Laser-Induced Damage Thresholds of SiO/sub 2/ Films Grown with Different Assistance Parameters: A Comparative Study Performed by the Photoacoustic Mirage Technique
M. Alvisi, G. De Nunzio, M. Perrone, A. Rizzo, S. Scaglione, L. Vasanelli
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引用次数: 0
Abstract
The quality of laser beams strongly depends on the optical characteristics of the cavity mirrors; thus the development of good quality UV/VUV coated optical components is much requested by researchers and industry. The choice of the deposition technique has a considerable influence on the film features: the use of ion assisted techniques is a means of improving the compactness and adhesion of films, while limiting the temperature of the substrate during the deposition.
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