Basic building blocks development for a SiN platform in the visible range

Abstract

Integrated silicon photonics in the visible range is one of the areas that is emerging and growing in the market for different applications, such as: biosensing, optogenetics, quantum computing, imaging and display, fluorescence microscopy, cytometry, tomography, LIDAR and Lifi. Here, we present the first steps to build a process design kit of components in the visible range centered at 633 nm using a LPCVD silicon nitride platform. The first basic elements are presented (grating couplers, single mode waveguides and a MMI).