{"title":"Finite Element Simulation of Horizontal Micro-milling Machine under Different Working Conditions","authors":"Yongqin Ren, Zehui Zheng, Xiubing Jing, He Yang","doi":"10.1109/3M-NANO56083.2022.9941539","DOIUrl":null,"url":null,"abstract":"Micro-deformation is a non-negligible part of the micro-fabrication field, so it is essential to study the structural performances of micro-fabrication equipment. This paper utilizes the finite element method (FEM) to simulate the three working conditions of a horizontal micro-milling machine statically. The optimized structure of the Y-axis has reduced the maximum deformation of the machine tool clamp in the Z- and Y-directions under working condition 1 by 43.7% and 41.6%, respectively.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"526 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO56083.2022.9941539","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Micro-deformation is a non-negligible part of the micro-fabrication field, so it is essential to study the structural performances of micro-fabrication equipment. This paper utilizes the finite element method (FEM) to simulate the three working conditions of a horizontal micro-milling machine statically. The optimized structure of the Y-axis has reduced the maximum deformation of the machine tool clamp in the Z- and Y-directions under working condition 1 by 43.7% and 41.6%, respectively.
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