{"title":"Gas Sensing Studies of Tin Oxide Thin Films Annealed at Different Temperatures","authors":"K. S. Thakare, S. J. Patil, R. R. Ahire","doi":"10.21013/JTE.V9.N2.P1","DOIUrl":null,"url":null,"abstract":"Thin films of Tin oxide (SnO 2 ) were prepared by physical vapour deposition method. The as-prepared films were further annealed at 300°C, 400°C and 500°C to study the effect of annealing on the physical as well as gas sensing properties of the thin films. Gas sensing performance of annealed SnO 2 thin films was studied for different gases having different concentrations at working temperature of 250°C. Significantly, gas response changes for SnO 2 samples annealed at different temperatures, which is discussed herein.","PeriodicalId":269688,"journal":{"name":"IRA-International Journal of Technology & Engineering","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IRA-International Journal of Technology & Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.21013/JTE.V9.N2.P1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Thin films of Tin oxide (SnO 2 ) were prepared by physical vapour deposition method. The as-prepared films were further annealed at 300°C, 400°C and 500°C to study the effect of annealing on the physical as well as gas sensing properties of the thin films. Gas sensing performance of annealed SnO 2 thin films was studied for different gases having different concentrations at working temperature of 250°C. Significantly, gas response changes for SnO 2 samples annealed at different temperatures, which is discussed herein.
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