{"title":"How thin an optical coating? The case of atomic layer deposited TiO2 on native oxide/Si","authors":"M. Pereira, G. R. Toniello, K. Souza, F. Horowitz","doi":"10.1364/OIC.2019.THC.9","DOIUrl":null,"url":null,"abstract":"A spectrally-extended Abeles method was used for probing ALD deposited TiO2 films on native oxide/Si, whose AFM imaged nanotopology was approximately followed. Cauchy fitting to the experimental data was possible until ~1/10 quarterwave optical thickness.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.THC.9","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A spectrally-extended Abeles method was used for probing ALD deposited TiO2 films on native oxide/Si, whose AFM imaged nanotopology was approximately followed. Cauchy fitting to the experimental data was possible until ~1/10 quarterwave optical thickness.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
