High-Speed-Operation of Compact All-Silicon Segmented Mach-Zehnder Modulator Integrated with Passive RC Equalizer for Optical DAC Transmitter

Y. Sobu, Shinsuke Tanaka, Yu Tanaka, Y. Akiyama, T. Hoshida
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引用次数: 6

Abstract

We experimentally demonstrated 70Gbaud PAM4 and 90Gbaud NRZ operations of all­silicon segmented modulator for optical DAC transmitter. Monolithic integration of MIM capacitor enabled broad EO bandwidth of 43.9GHz and small footprint of 300×600µm2.
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集成无源RC均衡器的紧凑型全硅分段马赫-曾德尔调制器的高速运行
实验验证了全硅分段调制器70Gbaud PAM4和90Gbaud NRZ的工作原理。MIM电容器的单片集成实现了43.9GHz的宽EO带宽和300×600µm2的小占地面积。
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