Voltage Controlled Oscillator Using Tunable Mems Resonator

Abstract

In this work , a tunable resonator is designed. Using the voltage actuators, the fundamental resonance frequency of the resonator is varied. The voltage applied to the tuning combs results in change in the stiffness of the folded beam suspension, which in turn changes resonant frequency. The resonator is modeled in circuit simulator using voltage controlled current sources. The effect of change in stiffness (kc) is included to model tunable resonator. A voltage-controlled oscillator is designed using the tunable resonator.