Penghui Ma, A. Szeghalmi, U. Schulz, F. Rickelt, V. Beladiya, P. Zimmermann, Li Li
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引用次数: 1
Abstract
The design and fabrication results of single, low-ripples and broadband chirped mirrors with an integrated nano-porous layer using two different processes, atomic layer deposition and plasma etching, will be presented.
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