Satoshi Tsuyuguchi, S. Mustofa, T. Araki, M. Nishida, T. Hino
{"title":"Development of multi layer ceramic capacitor by pulsed laser deposition","authors":"Satoshi Tsuyuguchi, S. Mustofa, T. Araki, M. Nishida, T. Hino","doi":"10.1117/12.486580","DOIUrl":null,"url":null,"abstract":"A thin film is a very attractive material in applications for capacitor material. Since the capacitance of multi layer capacitor is proportional to the number of dielectric layer and it is inversely as thickness, making thickness of film thin has a double advantage, in order to enlarge the capacitance. This research was performed thin film sizing and growth control of BaTiO3, which are used as a dielectric. The increase of capacitance is predominant over the present value of 1nF.","PeriodicalId":159280,"journal":{"name":"International Congress on Laser Advanced Materials Processing","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-02-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Congress on Laser Advanced Materials Processing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.486580","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
A thin film is a very attractive material in applications for capacitor material. Since the capacitance of multi layer capacitor is proportional to the number of dielectric layer and it is inversely as thickness, making thickness of film thin has a double advantage, in order to enlarge the capacitance. This research was performed thin film sizing and growth control of BaTiO3, which are used as a dielectric. The increase of capacitance is predominant over the present value of 1nF.
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