N. Ohyama, I. Ichimura, I. Yamaguchi, T. Honda, J. Tsujiuchi
{"title":"A Dynamic Zone Plate Interferometer for Measuring Aspherical Surfaces","authors":"N. Ohyama, I. Ichimura, I. Yamaguchi, T. Honda, J. Tsujiuchi","doi":"10.1364/holography.1986.mb1","DOIUrl":null,"url":null,"abstract":"This paper proposes a dynamic zone plate interferometer (DZPI), which has a possibility of measuring aspherical surfaces without the need of either a standard surface or of a computer generated holograms (CGH). The accuracy of surface error measurments can be improved by using a fringe analysis method up to about λ/100. An experimantal result is also presented.","PeriodicalId":394593,"journal":{"name":"Topical Meeting on Holography","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Topical Meeting on Holography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/holography.1986.mb1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper proposes a dynamic zone plate interferometer (DZPI), which has a possibility of measuring aspherical surfaces without the need of either a standard surface or of a computer generated holograms (CGH). The accuracy of surface error measurments can be improved by using a fringe analysis method up to about λ/100. An experimantal result is also presented.
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