{"title":"A new RF MEMS technology enabling tunability for RF front-end RF ohmic relay based on a flexible anchorless membrane","authors":"O. Millet","doi":"10.23919/EUMC.2012.6459130","DOIUrl":null,"url":null,"abstract":"This paper presents a new RF MEMS relay dedicated to mobile applications. The challenges, the MEMS technology & the packaging solution are introduced.","PeriodicalId":266910,"journal":{"name":"2012 42nd European Microwave Conference","volume":"30 2","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 42nd European Microwave Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/EUMC.2012.6459130","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper presents a new RF MEMS relay dedicated to mobile applications. The challenges, the MEMS technology & the packaging solution are introduced.
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