{"title":"Simulation of Piezoelectric Disc & Micromachined Ultrasound Transducer","authors":"S. Atheeth, M. Arora","doi":"10.1109/CONECCT55679.2022.9865705","DOIUrl":null,"url":null,"abstract":"The paper reports simulation of piezoelectric disc and its extension to understand pMUT operation. The theoretical formulation matches the simulation results for piezo disc and pMUT at fundamental mode of vibration within 5% of each other. Stress formation in layers, central displacement, pressure output at 3mm distance for both PZT and AlN (Aluminium Nitride) as the piezo layer in pMUT are captured via the simulation model and compared.","PeriodicalId":380005,"journal":{"name":"2022 IEEE International Conference on Electronics, Computing and Communication Technologies (CONECCT)","volume":"85 ","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Conference on Electronics, Computing and Communication Technologies (CONECCT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CONECCT55679.2022.9865705","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The paper reports simulation of piezoelectric disc and its extension to understand pMUT operation. The theoretical formulation matches the simulation results for piezo disc and pMUT at fundamental mode of vibration within 5% of each other. Stress formation in layers, central displacement, pressure output at 3mm distance for both PZT and AlN (Aluminium Nitride) as the piezo layer in pMUT are captured via the simulation model and compared.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
