D. Bailey, D. Blackwell, J.C. Bradley, R. Moore, H. Salvo
{"title":"A variational analysis of cylindrically symmetric FBARs","authors":"D. Bailey, D. Blackwell, J.C. Bradley, R. Moore, H. Salvo","doi":"10.1109/ULTSYM.1988.49404","DOIUrl":null,"url":null,"abstract":"The resonant modes of cylindrically symmetric film bulk acoustic resonators (FBARs) are found by variational analysis. The FBARs under consideration are fabricated by depositing gold, zinc oxide and aluminum films onto a membrane of fused quartz. The method of analysis allows the transducer and the membrane to have unequal diameters. The primary objective of this work is to investigate the effect of the transducer diameter on the mode spectrum, particularly the intermode spacing. Each trial function used in the analysis is a product of a radial and an axial function. It is desirable for the trial functions to have local support and a certain degree of smoothness. The Schoenberg cubic B-spline satisfies these criteria. Accurate eigenanalyses are available for several hundred angularly symmetric modes.<<ETX>>","PeriodicalId":263198,"journal":{"name":"IEEE 1988 Ultrasonics Symposium Proceedings.","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1988-10-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE 1988 Ultrasonics Symposium Proceedings.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1988.49404","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The resonant modes of cylindrically symmetric film bulk acoustic resonators (FBARs) are found by variational analysis. The FBARs under consideration are fabricated by depositing gold, zinc oxide and aluminum films onto a membrane of fused quartz. The method of analysis allows the transducer and the membrane to have unequal diameters. The primary objective of this work is to investigate the effect of the transducer diameter on the mode spectrum, particularly the intermode spacing. Each trial function used in the analysis is a product of a radial and an axial function. It is desirable for the trial functions to have local support and a certain degree of smoothness. The Schoenberg cubic B-spline satisfies these criteria. Accurate eigenanalyses are available for several hundred angularly symmetric modes.<>
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
