A robust, efficient process to produce scalable, superconducting kilopixel far-IR detector arrays

J. Staguhn, E. Sharp, S. Duff, G. Hilton, Ari D. Brown, F. Colazo, N. Costen, S. Moseley, Frederick H. Wang, Edward J. Wollack, Sang Yoon
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Abstract

Robust, high sensitivity kilopixel format arrays with large focal plane filling factors and low cosmic ray cross sections that operate over the entire far-IR regime are required for future NASA missions, such as Origins and a future far-IR Probe. Our kilopixel Backshort Under Grid (BUG) detectors are designed to meet all those requirements: By bump-bonding two-dimensional detector arrays to readout multiplexers are gaplessly tileable in one spatial direction with the integration of the multiplexer scalable beyond wafer sizes. The detector arrays provide high filling factors (<90% at 1mm pixel pitch) and are designed for low Cosmic ray cross sections. The major missing technology is a detector array architecture that can be gaplessly tiled to deliver the desired pixel counts of npixel ~105, while being providing a robust process to produce these detector arrays. We introduce a new array architecture that is very flexible allowing for a variety of tileable solutions and describe its individual components and the tests of those. Our results demonstrate that this architecture allows for flexible designs with high yields and reliable superconducting bump-bond connections of detectors and the cold readout SQUID multiplexers directly under the detector array, or on a different board that can be connected with e.g. flex lines for compact tiling.
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一个强大的,有效的过程,以生产可扩展的,超导千像素远红外探测器阵列
在未来的NASA任务中,如起源和未来的远红外探测器,需要具有大焦平面填充系数和低宇宙射线横截面的鲁棒、高灵敏度千像素格式阵列。我们的千像素网格下背短(BUG)探测器旨在满足所有这些要求:通过碰撞键合二维探测器阵列,读出多路复用器可以在一个空间方向上无间隙地平铺,多路复用器的集成可扩展到晶圆尺寸之外。探测器阵列提供高填充系数(在1mm像素间距<90%),并且设计用于低宇宙射线横截面。主要缺失的技术是探测器阵列架构,该架构可以无缝平铺以提供所需的npixel ~105像素数,同时提供生成这些探测器阵列的稳健过程。我们引入了一个新的阵列架构,它非常灵活,允许各种平铺解决方案,并描述了它的各个组件和测试。我们的研究结果表明,这种架构允许灵活的设计,具有高产量和可靠的超导碰撞键连接探测器和冷读出SQUID多路复用器直接在探测器阵列下,或在不同的板上,可以连接例如柔性线用于紧凑的平铺。
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