M. Elmala, A. Omar, A. Metawea, A. Ismail, A. Elmallah, A. Saeed, A. Elsayed, M. BenSaleh, A. Obeid, A. Alghofaili, I. Alzahem, S. Alshaibani, M. Alnahdi, N. ALjehani, A. Bhybha, Syed Manzoor Qasim
{"title":"Electronic interface system with 7.5/12.5V actuation for MEMS accelerometer","authors":"M. Elmala, A. Omar, A. Metawea, A. Ismail, A. Elmallah, A. Saeed, A. Elsayed, M. BenSaleh, A. Obeid, A. Alghofaili, I. Alzahem, S. Alshaibani, M. Alnahdi, N. ALjehani, A. Bhybha, Syed Manzoor Qasim","doi":"10.1109/ACCS-PEIT.2017.8302992","DOIUrl":null,"url":null,"abstract":"An electronic interface system for MEMS accelerometer is implemented in 0.18μm HVCMOS technology. The ASIC uses 7.5/12.5V to increase the net actuation force and increases the input acceleration range. The measured ASIC sensitivity is 35fF/g. Maximum measured error is 0.38% of full scale, for 0 to 5g input acceleration. This ASIC interface includes on-chip reference generation, decimation, and temperature compensation","PeriodicalId":187395,"journal":{"name":"2017 Intl Conf on Advanced Control Circuits Systems (ACCS) Systems & 2017 Intl Conf on New Paradigms in Electronics & Information Technology (PEIT)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 Intl Conf on Advanced Control Circuits Systems (ACCS) Systems & 2017 Intl Conf on New Paradigms in Electronics & Information Technology (PEIT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ACCS-PEIT.2017.8302992","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
An electronic interface system for MEMS accelerometer is implemented in 0.18μm HVCMOS technology. The ASIC uses 7.5/12.5V to increase the net actuation force and increases the input acceleration range. The measured ASIC sensitivity is 35fF/g. Maximum measured error is 0.38% of full scale, for 0 to 5g input acceleration. This ASIC interface includes on-chip reference generation, decimation, and temperature compensation
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