Fabrication of Multimodal Image Sensor Capable of Simultaneous Measurement of Pressure and pH

Abstract

In this study, we propose a pressure-ion image sensor that can simultaneously measure pressure and ion distribution with a patterned piezoelectric film on a pH image sensor. By patterning using photolithography and lift-off, a structure with alternating pressure and pH sensing areas was achieved, and the fabricated pressure-ion image sensor successfully visualized pH and pressure distribution simultaneously.