A measurement system for surface topography based on three-wavelength interferometry

2017 International Conference on Mechanical, System and Control Engineering (ICMSC) Pub Date : 2017-05-01 DOI:10.1109/ICMSC.2017.7959485

Yang Liangen, L. Chuang, Wang Xuanze, He Tao, Zhai Zhongsheng

{"title":"A measurement system for surface topography based on three-wavelength interferometry","authors":"Yang Liangen, L. Chuang, Wang Xuanze, He Tao, Zhai Zhongsheng","doi":"10.1109/ICMSC.2017.7959485","DOIUrl":null,"url":null,"abstract":"Optical microscopic interferometry is an important measurement method for surface topography. There is usually contradiction between enlargement of measuring interval and improvement of measuring precision. In this paper, a three- wavelength interference measurement system for surface topography based on wavelength switch and phase shift scanning is proposed. A data processing method for three- wavelength interference images is proposed, which use the phase extraction and recognition algorithm based on elliptic fitting and combined size scales of phase difference. The method can effectively improve the overall precision of surface topography measurement and expand measuring interval to nearly 27 times that of single wavelength 640 nm. Experimental results have shown that the relative measurement error of surface roughness of square wave specimen with multiple grooves is only 4.1% compared to the calibrated data which is produced by China National Institute of Metrology. Therefore, the three-wavelength interferometry method can realize high precision measurement for surface topography in a certain measuring interval.","PeriodicalId":356055,"journal":{"name":"2017 International Conference on Mechanical, System and Control Engineering (ICMSC)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 International Conference on Mechanical, System and Control Engineering (ICMSC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMSC.2017.7959485","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

Abstract

Optical microscopic interferometry is an important measurement method for surface topography. There is usually contradiction between enlargement of measuring interval and improvement of measuring precision. In this paper, a three- wavelength interference measurement system for surface topography based on wavelength switch and phase shift scanning is proposed. A data processing method for three- wavelength interference images is proposed, which use the phase extraction and recognition algorithm based on elliptic fitting and combined size scales of phase difference. The method can effectively improve the overall precision of surface topography measurement and expand measuring interval to nearly 27 times that of single wavelength 640 nm. Experimental results have shown that the relative measurement error of surface roughness of square wave specimen with multiple grooves is only 4.1% compared to the calibrated data which is produced by China National Institute of Metrology. Therefore, the three-wavelength interferometry method can realize high precision measurement for surface topography in a certain measuring interval.

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

基于三波长干涉测量的表面形貌测量系统

光学显微干涉测量是一种重要的表面形貌测量方法。测量间隔的扩大与测量精度的提高之间往往存在矛盾。提出了一种基于波长开关和相移扫描的三波长表面形貌干涉测量系统。提出了一种基于椭圆拟合和组合相位差尺度的相位提取与识别算法的三波长干涉图像数据处理方法。该方法可以有效地提高表面形貌测量的整体精度，并将测量间隔扩大到单个波长640 nm的近27倍。实验结果表明，与中国计量科学研究院标定数据相比，多沟槽方波试样表面粗糙度的相对测量误差仅为4.1%。因此，三波长干涉测量法可以在一定的测量间隔内实现对表面形貌的高精度测量。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文去求助

来源期刊

2017 International Conference on Mechanical, System and Control Engineering (ICMSC)

自引率

0.00%

发文量