{"title":"Large-Stroke Varifocal Mirror with Hydraulic Actuation for Endoscopic Laser Surgery","authors":"A. Geraldes, A. Jacassi, P. Fiorini, L. Mattos","doi":"10.1109/BIOROB.2018.8487927","DOIUrl":null,"url":null,"abstract":"Endoscopic laser tools allow using the precision of surgical lasers in minimally invasive procedures. However due to the difficulty of adjusting the focal length of the laser during the procedure, ablation is typically performed with the fiber laser in contact with the tissue, which often leads to tissue carbonization. To overcome this problem, MEMS varifocal mirrors can be used. This paper presents a large-stroke MEMS varifocal mirror for an endoscopic laser tool, composed of a 4 mm circular silicon nitride membrane. Using hydraulic actuation, large optical power can be achieved while maintaining good optical quality. Experimental characterization shows that the mirror can achieve an optical power range of more than 64 m−1with 9000 Pa of actuation.","PeriodicalId":382522,"journal":{"name":"2018 7th IEEE International Conference on Biomedical Robotics and Biomechatronics (Biorob)","volume":"140 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 7th IEEE International Conference on Biomedical Robotics and Biomechatronics (Biorob)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/BIOROB.2018.8487927","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Endoscopic laser tools allow using the precision of surgical lasers in minimally invasive procedures. However due to the difficulty of adjusting the focal length of the laser during the procedure, ablation is typically performed with the fiber laser in contact with the tissue, which often leads to tissue carbonization. To overcome this problem, MEMS varifocal mirrors can be used. This paper presents a large-stroke MEMS varifocal mirror for an endoscopic laser tool, composed of a 4 mm circular silicon nitride membrane. Using hydraulic actuation, large optical power can be achieved while maintaining good optical quality. Experimental characterization shows that the mirror can achieve an optical power range of more than 64 m−1with 9000 Pa of actuation.
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