A multi criteria decision making approach to model selection for semiconductor manufacturing process simulation

Gonca Altuger-Genc, Lucy Tzitzimititla
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Abstract

This study examines the manufacturing portion of the semiconductor supply chain, and presents three different models to analyze the manufacturing process. The models have different levels of complexity, detail and features. The best-fitting modeling approach is selected using a multi criteria decision-making process.
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半导体制造过程仿真模型选择的多准则决策方法
本研究考察了半导体供应链的制造部分,并提出了三种不同的模型来分析制造过程。这些模型具有不同程度的复杂性、细节和特征。使用多准则决策过程选择最佳拟合建模方法。
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