Backside emitting silicon photonic beam steering module for LIDAR application

X. Chen, F. Meng, S. Fortune, A. Compston, M. Ebert, X. Yan, H. Du, M. Banakar, D. Tran, C. Littlejohns, D. Thomson, R. Nicolaescu, G. Reed
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Abstract

We present a silicon photonic beam steering device based upon an 8 x 8 grating coupler focal plane array fed by a MZI switching tree. Transmission of the light from the grating couplers is made through the back side of the chip using topside mirrors.
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用于激光雷达的后发射硅光子束导向模块
提出了一种基于MZI开关树馈电的8 × 8光栅耦合器焦平面阵列的硅光子光束导向装置。来自光栅耦合器的光通过芯片背面的反射镜进行传输。
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