S. Chung, Jiyun Kim, S. Min, Nari Kim, Sunghoon Kwon
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引用次数: 1
Abstract
We demonstrate in-situ fabrication of magnetic actuators using optofluidic maskless lithography (OFML). Photopatterning of magnetic structures in same place with actuation area reduces extra steps for transportation from the fabrication site to actuation site.
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