{"title":"Charging regimes of insulators under low energy electron beam (200 eV to 10 keV)","authors":"G. Blaise, D. Braga","doi":"10.1109/ISE.2002.1042933","DOIUrl":null,"url":null,"abstract":"Charging properties of insulators are investigated with a SEM by measuring the amount of trapped charges and the SEE yield /spl delta/ as a function of current density J and dose D, in a wide energy range 200 eV - 10 keV. Three stationary charging regimes (self-regulation, ageing, degradation) depending on J have been identified.","PeriodicalId":331115,"journal":{"name":"Proceedings. 11th International Symposium on Electrets","volume":"41 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings. 11th International Symposium on Electrets","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISE.2002.1042933","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Charging properties of insulators are investigated with a SEM by measuring the amount of trapped charges and the SEE yield /spl delta/ as a function of current density J and dose D, in a wide energy range 200 eV - 10 keV. Three stationary charging regimes (self-regulation, ageing, degradation) depending on J have been identified.
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