Precision Flat Polishing Of Lithium Niobate

J. Seckold
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引用次数: 1

Abstract

Lithium niobate (LiNbO3) is a man-made, birefringent, electro-optically active crystal. We have used LiNbO3 in the fabrication of 75mm diameter, thin, solid Fabry-Perot etalons [1], and 50mm diameter birefringent plates for a Lyot filter. The tight tolerances on the transmitted wavefront for these components require that the material be of extremely high quality and that the surfaces be polished flat to λ/30, or better. Cutting and grinding of LiNbO3 presents no problems, since diamond cutting tools and conventional, loose, abrasive grinding can be used, but precision polishing requires special techniques.
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铌酸锂的精密平面抛光
铌酸锂(LiNbO3)是一种人造的、双折射的、电光活性晶体。我们已经将LiNbO3用于制造直径为75mm的薄固体Fabry-Perot标准子[1],以及用于Lyot滤光片的直径为50mm的双折射板。这些组件的透射波前的严格公差要求材料具有极高的质量,并且表面抛光平整到λ/30或更好。切割和研磨LiNbO3没有问题,因为金刚石切割工具和传统的、松散的、磨料研磨可以使用,但精密抛光需要特殊的技术。
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