Xiaolin Jin, Zhonghai Yang, Tao Huang, Xiaofang Zhu, Jianqing Li, Bin Li
{"title":"Neutral pressure effects on ionization characteristics of electron cyclotron resonance discharge","authors":"Xiaolin Jin, Zhonghai Yang, Tao Huang, Xiaofang Zhu, Jianqing Li, Bin Li","doi":"10.1109/IVEC.2011.5747033","DOIUrl":null,"url":null,"abstract":"The code with quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision (PIC/MCC) method is developed for the research of ionization process of argon electron cyclotron resonance (ECR) discharge. Monte Carlo techniques are used on a large ensemble of charged particles to ensure accurate representation of the stochastic process. Recent work has focused on the effects of neutral pressure on the characteristics of ECR discharge and ECR plasma.","PeriodicalId":106174,"journal":{"name":"2011 IEEE International Vacuum Electronics Conference (IVEC)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-02-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 IEEE International Vacuum Electronics Conference (IVEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVEC.2011.5747033","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The code with quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision (PIC/MCC) method is developed for the research of ionization process of argon electron cyclotron resonance (ECR) discharge. Monte Carlo techniques are used on a large ensemble of charged particles to ensure accurate representation of the stochastic process. Recent work has focused on the effects of neutral pressure on the characteristics of ECR discharge and ECR plasma.
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