Theoretical models and comparison of three focus-error detection methods

Song Shen, D. Cui, Xiong Qian, Yongming Shu
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引用次数: 1

Abstract

Comparison of three common focus error detection methods is made on a unified theoretical background. New mathematical models are built up on physical optics. The compared items are theoretical optical gain, adjustment factors, etc., and the theoretical and experimental results are given.
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三种聚焦误差检测方法的理论模型及比较
在统一的理论背景下,对常用的三种调焦误差检测方法进行了比较。在物理光学上建立了新的数学模型。比较了理论光增益、调整系数等项目,并给出了理论和实验结果。
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