The testing machine for micro-sensors subjected to different states of pressure and temperature

Abstract

The primary purpose of this research is to design and build up a test machine which provides a testing environment for semiconductor micro sensors made by micro-electro-mechanical systems (MEMS) technique. It combines computer auxiliary software SPARTAN into the global data-gathering system in addition to the main frame of the pressurized chamber. Different states of temperature and pressure subject to the testing of commercial pressure sensors was not only successfully achieved but the real-time sampling of the MEMS sensor output also worked well.