Design of a Biomimetic Directional Microphone Diaphragm

Abstract

A miniature silicon condenser microphone diaphragm has been designed that exhibits good predicted directionality, sensitivity, and reliability. The design was based on the structure of a fly’s ear (Ormia ochracea) that has highly directional hearing through mechanical coupling of the eardrums. The diaphragm that is 1mm × 2mm × 20 microns is intended to be fabricated out of polysilicon through microelectromechanical micromachining. It was designed through the finite-element method in ANSYS in order to build the necessary mode shapes and frequencies into the mechanical behavior of the design. Through postprocessing of the ANSYS data, the diaphragm’s response to an arbitrary sound source, sensitivity, robustness, and Articulation Index - Directivity Index (AI-DI) were predicted. The design should yield a sensitivity as high as 100 mV/Pa, an AI-DI of 4.764 with Directivity Index as high as 6 between 1.5 and 5 kHz. The diaphragm structure was predicted be able to withstand a sound pressure level of 151.74 dB. The sound level that would result in collapse of the capacitive sensor is 129.9 dB.. The equivalent sound level due to the self-noise of the microphone is predicted to be 30.8 dBA.