{"title":"Fabrication of three-dimensional photonic crystals with midgap wavelength at 1.55 /spl mu/m","authors":"M. Qi, S. Johnson, J. Joannopoulos, H. L. Smith","doi":"10.1109/QELS.2003.238455","DOIUrl":null,"url":null,"abstract":"Seven-functional-layer 3D photonic crystals with midgap wavelength at 1.55 /spl mu/m were fabricated with a layer-by-layer approach. We employed e-beam lithography to align and define the pattern, reactive-ion-etching to transfer the pattern, and spin-on-dielectrics to planarize the surface. Four such cycles were sufficient to complete the fabrication.","PeriodicalId":432096,"journal":{"name":"Conference on Lasers and Electro-Optics, 2003. CLEO '03.","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference on Lasers and Electro-Optics, 2003. CLEO '03.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/QELS.2003.238455","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Seven-functional-layer 3D photonic crystals with midgap wavelength at 1.55 /spl mu/m were fabricated with a layer-by-layer approach. We employed e-beam lithography to align and define the pattern, reactive-ion-etching to transfer the pattern, and spin-on-dielectrics to planarize the surface. Four such cycles were sufficient to complete the fabrication.
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