{"title":"Improving Minimum Feature Sizes of Subwavelength Grating Slot Waveguide Optical Sensors","authors":"Can Ozcan, J. Aitchison, M. Mojahedi","doi":"10.1109/IPC53466.2022.9975740","DOIUrl":null,"url":null,"abstract":"We show that the minimum feature size of subwavelength grating slot waveguides can be increased from 60 nm to 120 nm with enhanced fabrication tolerance and only 13 nm/RIU reduction in the bulk sensitivity from 538 nm/RIU to 525 nm/RIU.","PeriodicalId":202839,"journal":{"name":"2022 IEEE Photonics Conference (IPC)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE Photonics Conference (IPC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPC53466.2022.9975740","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
We show that the minimum feature size of subwavelength grating slot waveguides can be increased from 60 nm to 120 nm with enhanced fabrication tolerance and only 13 nm/RIU reduction in the bulk sensitivity from 538 nm/RIU to 525 nm/RIU.
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