Demonstration of 2D/3D p-MoS2/n-SiC junction

Edwin W. Lee, Lu Ma, D. Nath, C. Lee, Yiying Wu, S. Rajan
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Abstract

In this work, we demonstrate 2D/3D heterojunction using large-area crystalline p-MoS2 epitaxially grown on n-doped 4H-SiC. The diode exhibited excellent rectification with an ideality factor of 1.5, as well as C-V characteristics typical of an anisotype p-n junction. Besides being promising for enabling novel device topologies, this realization of a p-type 2D/n-type 3D heterostructure holds potential for circumventing challenges associated with p-doping in wide bandgap (WBG) semiconductors which has otherwise held back the successful development of bipolar devices in WBG systems.
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2D/3D p-MoS2/n-SiC结的演示
在这项工作中,我们利用大面积晶体p-MoS2外延生长在n掺杂的4H-SiC上,展示了2D/3D异质结。二极管表现出良好的整流,理想因数为1.5,以及典型的各向异性p-n结的C-V特性。除了有望实现新的器件拓扑结构外,这种p型2D/n型3D异质结构的实现还具有克服宽带隙(WBG)半导体中p掺杂相关挑战的潜力,这些挑战阻碍了WBG系统中双极器件的成功开发。
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