T. Moriwaki, Ryuji Takaya, K. Sasagawa, K. Fujisaki
{"title":"Experimental evaluation of threshold current density for electromigration damage in Al interconnect line with reservoir and sink structure","authors":"T. Moriwaki, Ryuji Takaya, K. Sasagawa, K. Fujisaki","doi":"10.1299/mel.22-00035","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":180561,"journal":{"name":"Mechanical Engineering Letters","volume":"31 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Mechanical Engineering Letters","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1299/mel.22-00035","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}