{"title":"Torsional Mems Varactor With Low Actuation Voltage","authors":"C. Venkatesh, S. Pati, N. Bhat","doi":"10.1142/S1465876303001745","DOIUrl":null,"url":null,"abstract":"A MEMS varactor using torsional beams for actuation is proposed. Analytical expression for electrostatic torque developed is derived. The structure is compared with existing structure for dynamic range and actuation voltage. A compensator is designed to improve the transient performance of the device.","PeriodicalId":331001,"journal":{"name":"Int. J. Comput. Eng. Sci.","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Int. J. Comput. Eng. Sci.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1142/S1465876303001745","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
A MEMS varactor using torsional beams for actuation is proposed. Analytical expression for electrostatic torque developed is derived. The structure is compared with existing structure for dynamic range and actuation voltage. A compensator is designed to improve the transient performance of the device.
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