James Green, Carlos R. Vilorio, Kalliyan Lay, Christine Lastra, A. Hawkins
{"title":"Silicon Micro Gas Chromatography with Silk Screen Heater and Polyimide Capillary Insertion","authors":"James Green, Carlos R. Vilorio, Kalliyan Lay, Christine Lastra, A. Hawkins","doi":"10.1109/IETC47856.2020.9249209","DOIUrl":null,"url":null,"abstract":"We have designed and fabricated a silicon microchip capable of gas chromatography. The microchips feature onboard heaters and direct interfacing with silica capillaries for the lowest possible thermal mass and are capable of operating at over 300°C.","PeriodicalId":186446,"journal":{"name":"2020 Intermountain Engineering, Technology and Computing (IETC)","volume":"258 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-10-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 Intermountain Engineering, Technology and Computing (IETC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IETC47856.2020.9249209","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
We have designed and fabricated a silicon microchip capable of gas chromatography. The microchips feature onboard heaters and direct interfacing with silica capillaries for the lowest possible thermal mass and are capable of operating at over 300°C.