Subsurface Damage in Optical Materials: Origin, Measurement and Removal

P. Hed, D. Edwards, Janet B. Davis
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引用次数: 48

Abstract

The detection, measurement and removal of subsurface damage is a major effort of the LLNL Optical Sciences and Engineering Group. We will describe and show examples of three methods we are currently using to detect and measure the depth of damage in glasses and crystalline materials: taper polishing and etching, constancy of chemical etch rate, and small specimen fracture. In addition, results will be given to show that the depth of damage can often be approximated from the surface roughness and Young's modulus.
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光学材料的亚表面损伤:起源、测量和去除
探测、测量和去除亚表面损伤是LLNL光学科学与工程小组的主要工作。我们将描述并展示我们目前用于检测和测量玻璃和晶体材料损伤深度的三种方法的例子:锥形抛光和蚀刻,化学蚀刻速率的恒定性和小试样断裂。此外,结果将表明,损伤的深度往往可以近似地从表面粗糙度和杨氏模量。
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