{"title":"Design and fabrication of tunable MSM PD for analog optical links","authors":"K. Komirisetty, N. Greene Z, D. Geddis","doi":"10.1109/AVFOP.2015.7356640","DOIUrl":null,"url":null,"abstract":"An integrated tunable MSM PD based on Indium Tin Oxide (ITO) that is fabricated on Si and InP. Tuning is achieved by thermally controlling the bandgap of the semiconductor using a Nickel Chromium (NiCr) microheater.","PeriodicalId":187785,"journal":{"name":"2015 IEEE Avionics and Vehicle Fiber-Optics and Photonics Conference (AVFOP)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE Avionics and Vehicle Fiber-Optics and Photonics Conference (AVFOP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/AVFOP.2015.7356640","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
An integrated tunable MSM PD based on Indium Tin Oxide (ITO) that is fabricated on Si and InP. Tuning is achieved by thermally controlling the bandgap of the semiconductor using a Nickel Chromium (NiCr) microheater.
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