Two-Dimensional Thermal Analysis Of Multi-Layer Thin Film Pyroelectric Infrared Detectors

Wei Zhang, X. Yao, Xiaoqing Wu
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引用次数: 1

Abstract

Two-dimensional thermal analysis of multi-layer thin film pyroelectric infrared detectors is performed according to the structure and test conditions of detectors and the temperature distribution of detectors is obtained. Result shows that the insulation layer of multi-layer film pyroelectric infrared detector can effectively reduce thermal flow from pyroelectric layer substrate and the response of detector increases with the increasing of insulation layer thickness; when the thermal conductivity of insulation layer is lower than of air, its performance is better than micro-bridge structure.
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多层薄膜热释电红外探测器的二维热分析
根据探测器的结构和测试条件,对多层薄膜热释电红外探测器进行了二维热分析,得到了探测器的温度分布。结果表明:多层薄膜热释电红外探测器的保温层可以有效地减少热释电层衬底的热流,探测器的响应随保温层厚度的增加而增加;当保温层导热系数低于空气时,其性能优于微桥结构。
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