{"title":"Modeling Of A Two-Axis Torsional Micromirror Using Ahdl","authors":"Guangya Zhou, F. Tay, Chau Fook Siong","doi":"10.1142/S1465876303001836","DOIUrl":null,"url":null,"abstract":"This paper presents the development of a reduced-order macro-model for a two-axis electrostatic torsional micromirror using analog hardware description language (AHDL). The proposed macro-model permits extremely fast simulation while providing nearly FEM accuracy. This enables the user to investigate the close-loop controlled global system level performances at acceptable computational cost.","PeriodicalId":331001,"journal":{"name":"Int. J. Comput. Eng. Sci.","volume":"104 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Int. J. Comput. Eng. Sci.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1142/S1465876303001836","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents the development of a reduced-order macro-model for a two-axis electrostatic torsional micromirror using analog hardware description language (AHDL). The proposed macro-model permits extremely fast simulation while providing nearly FEM accuracy. This enables the user to investigate the close-loop controlled global system level performances at acceptable computational cost.