X. Shi, Hehong Fan, F. Song, Xingqun Zhao, S. Wan, Xiaohan Sun
{"title":"Performance degradation simulation for M-type cathode based on ion bombardment","authors":"X. Shi, Hehong Fan, F. Song, Xingqun Zhao, S. Wan, Xiaohan Sun","doi":"10.1109/IVEC.2013.6571103","DOIUrl":null,"url":null,"abstract":"Simulation of M-type cathode performance degradation is studied based on ion bombardment with interdiffusion effect considered. Sputtered volume, sputter distribution and ion spot occurrence time can be estimated, with estimated sputtered volume close to former researches. For M-type Re-coated cathode with 300nm-thick film, ion spots were estimated to appear after 2.06×105 h's working.","PeriodicalId":283300,"journal":{"name":"2013 IEEE 14th International Vacuum Electronics Conference (IVEC)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE 14th International Vacuum Electronics Conference (IVEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVEC.2013.6571103","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Simulation of M-type cathode performance degradation is studied based on ion bombardment with interdiffusion effect considered. Sputtered volume, sputter distribution and ion spot occurrence time can be estimated, with estimated sputtered volume close to former researches. For M-type Re-coated cathode with 300nm-thick film, ion spots were estimated to appear after 2.06×105 h's working.
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