Growth of high quality GaN nanowalls on Si (111) surface

S. Shetty, S. M. Shivaprasad
{"title":"Growth of high quality GaN nanowalls on Si (111) surface","authors":"S. Shetty, S. M. Shivaprasad","doi":"10.1109/ICEMELEC.2014.7151190","DOIUrl":null,"url":null,"abstract":"In this article, we propose the formation of GaN nanowall morphology on Si (111) surface by varying nitrogen flux from 2, 4.5 and 6sccm in PA-MBE growth. The optical, structural and electrical properties of these films are investigated. Cathodo-luminescence data suggests that the nanowall network grown at 6sccm show high optical emission and high crystalline quality. The current-voltage (I-V) characteristics of the GaN films exhibit varying rectifying behavior at 1V with forward to reverse current ratios of 39, 155, 388 for the GaN layers grown at 2, 4.5 and 6 sccm while the reverse leakage current values are 1.2×10-3, 2.6×10-4 and 9×10-6 A respectively for these junctions. The good optical and electrical properties observed suggest that GaN/Si heterojunction grown at 6sccm nitrogen flow comprise of low defect density.","PeriodicalId":186054,"journal":{"name":"2014 IEEE 2nd International Conference on Emerging Electronics (ICEE)","volume":"60 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE 2nd International Conference on Emerging Electronics (ICEE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEMELEC.2014.7151190","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

Abstract

In this article, we propose the formation of GaN nanowall morphology on Si (111) surface by varying nitrogen flux from 2, 4.5 and 6sccm in PA-MBE growth. The optical, structural and electrical properties of these films are investigated. Cathodo-luminescence data suggests that the nanowall network grown at 6sccm show high optical emission and high crystalline quality. The current-voltage (I-V) characteristics of the GaN films exhibit varying rectifying behavior at 1V with forward to reverse current ratios of 39, 155, 388 for the GaN layers grown at 2, 4.5 and 6 sccm while the reverse leakage current values are 1.2×10-3, 2.6×10-4 and 9×10-6 A respectively for these junctions. The good optical and electrical properties observed suggest that GaN/Si heterojunction grown at 6sccm nitrogen flow comprise of low defect density.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
在Si(111)表面生长高质量GaN纳米壁
在本文中,我们提出了在PA-MBE生长过程中,在2、4.5和6sccm不同的氮通量下,在Si(111)表面形成GaN纳米壁形态。研究了这些薄膜的光学、结构和电学性能。阴极发光数据表明,生长在6sccm的纳米壁网络具有高光发射和高晶体质量。GaN膜的电流-电压(I-V)特性在1V时表现出不同的整流行为,在2、4.5和6 sccm生长的GaN层的正向和反向电流比分别为39、155和388,而这些结的反向泄漏电流值分别为1.2×10-3、2.6×10-4和9×10-6 A。观察到的良好的光学和电学性能表明,在6sccm氮流下生长的GaN/Si异质结具有低缺陷密度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Effect of Ga flux and rf-power on homoepitaxial growth of single crystalline GaN films Simulation study of the electrical behavior of bottom contact organic thin film transistors Effect of traps on small signal equivalent circuit in AlGaN/GaN HEMTs Subthreshold Analog/RF performance estimation of doping-less DGFET for ULP applications Suitability of sol-gel derived amorphous and crystalline compositions of In-Ga-Zn oxide for thin film transistors
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1