D. I. Panov, Z. Xi, V. Spiridonov, L. Azina, R. Nuryev, N.D. Prasolov, L. A. Sokura, D. Bauman, V. Bougrov
{"title":"Spray-Pyrolysis Fabrication and Quality Study of β-Ga2O3 Thin Films","authors":"D. I. Panov, Z. Xi, V. Spiridonov, L. Azina, R. Nuryev, N.D. Prasolov, L. A. Sokura, D. Bauman, V. Bougrov","doi":"10.17586/2687-0568-2021-3-4-7-12","DOIUrl":null,"url":null,"abstract":"In this paper, we report on the successful fabrication of β-Ga2O3 thin films by spray-pyrolysis technique. We provide the data on the dependence of the quality of the β-Ga2O3 films on the regimes and parameters of fabrication. Scanning electron microscopy, atomic force microscopy and optical spectroscopy are used to analyze film properties. X-ray diffraction phase analysis of the films after heat treatment at 900°C confirms the formation of β-Ga2O3 crystallites.","PeriodicalId":332408,"journal":{"name":"Reviews on Advanced Materials and Technologies","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Reviews on Advanced Materials and Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.17586/2687-0568-2021-3-4-7-12","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, we report on the successful fabrication of β-Ga2O3 thin films by spray-pyrolysis technique. We provide the data on the dependence of the quality of the β-Ga2O3 films on the regimes and parameters of fabrication. Scanning electron microscopy, atomic force microscopy and optical spectroscopy are used to analyze film properties. X-ray diffraction phase analysis of the films after heat treatment at 900°C confirms the formation of β-Ga2O3 crystallites.