IC Compatible Saw Devices on GaAs

T. Grudkowski, G. K. Montress, M. Gilden, J. F. Black
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Abstract

The application of gallium arsenide (GaAs) technology to high frequency digital and microwave integrated circuits is rapidly maturing. The present work considers the additional capabilities afforded by the inherent piezoelectric properties of GaAs. The emphasis of the work is on Surface Acoustic Wave (SAW) device configurations which may eventually be integrated with electronic circuits on the same substrate. The basic transduction and propagation characteristics for Rayleigh waves on <001>,
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GaAs上的IC兼容锯器件
砷化镓(GaAs)技术在高频数字和微波集成电路中的应用日趋成熟。本工作考虑了砷化镓固有的压电特性所提供的额外能力。这项工作的重点是表面声波(SAW)器件的配置,它最终可能与同一衬底上的电子电路集成。瑞利波的基本转导和传播特性
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