Optimization of beam length and air gap of suspended graphene NEMS switch for low pull-in voltage application

Abstract

The trend of miniaturization has led to the development of graphene nanoelectromechanical system (NEMS) switch due to high demand for low power consumption device applications. One of the important step before start the fabrication process is to model and simulate the graphene NEMS switch in order to get the optimum device dimension with low pull-in voltage applications. The present work represents simulations of suspended graphene length and air beam effects on the pull-in voltage for NEMS switch application. The analysis is done by 3D simulation using COMSOL Multiphysics software under electromechanics interface based on Finite Element Method (FEM). Comparable values with the conventional semiconductor switch of the pull-in voltage can be achieved at ratio below 10 to 0.5 value of the graphene beam length and air gap, respectively. This article is expected to estimate the operational parameter and dimension that can produce low pull-in voltage for a graphene NEMS switch operations.