A Study Of Closed-Loop Control Of Optical MEMS Device

H. Cai, C. W. Chan, K. Ling, C. Lu, Y. X. Wang, A. Liu
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Abstract

In this study, a digital control system is developed for the microelectromechanical (MEMS) device - Variable Optical Attenuator (VOA). With the closed-loop control circuit, each VOA module implements the functions of power set point tracking and disturbance rejection. Moreover, this control system, with the device, entrusts the VOA module with leading performance, stability, reliability and fast dynamic response.
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光学MEMS器件的闭环控制研究
本文针对微机电(MEMS)器件可变光衰减器(VOA)开发了一种数字控制系统。通过闭环控制电路,各VOA模块实现了功率设定点跟踪和抗干扰功能。此外,该控制系统配合该装置,使VOA模块具有领先的性能、稳定、可靠和快速的动态响应。
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