I. Veres, D. Profunser, O. Wright, O. Matsuda, U. Lang
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引用次数: 0
Abstract
We investigate experimentally and by numerical simulation the interaction between ultrahigh frequency surface acoustic waves (SAW) and periodic microstructures. We use both one-dimensional (1D) phononic crystals consisting of copper lines embedded in silicon oxide and 2D phononic crystals consisting of air-filled holes etched as a square lattice in a silicon substrate. Experimental results obtained by ultrashort pulsed optical excitation and interferometric detection are compared to time-domain finite element (FEM) simulations of the propagating ultrahigh frequency SAW with frequency components up to ~1 GHz in these phononic crystals, allowing the investigation of SAW scattering and phononic band structure. Good agreement was obtained between simulation and experiment.
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