H. Gutierrez-Candano, S. Camacho-Léon, G. Dieck-Assad, S. Martínez-Chapa
{"title":"Design and simulation of a self-assembled MEMS force sensor for Minimally Invasive Surgery","authors":"H. Gutierrez-Candano, S. Camacho-Léon, G. Dieck-Assad, S. Martínez-Chapa","doi":"10.1109/SAS.2011.5739819","DOIUrl":null,"url":null,"abstract":"This work describes the design and Finite Element Method (FEM) simulation of an integrated force microsensor which introduces a self-assembled tactile structure with potential application to Minimally Invasive Surgery (MIS). The sensor is designed to be compatible with Complementary Metal-Oxide-Semiconductor-Micro-Electro-Mechanical Systems (CMOS-MEMS) technology under monolithic microfabrication processes, and allows force measurements up to the micronewton scale.","PeriodicalId":401849,"journal":{"name":"2011 IEEE Sensors Applications Symposium","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 IEEE Sensors Applications Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SAS.2011.5739819","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This work describes the design and Finite Element Method (FEM) simulation of an integrated force microsensor which introduces a self-assembled tactile structure with potential application to Minimally Invasive Surgery (MIS). The sensor is designed to be compatible with Complementary Metal-Oxide-Semiconductor-Micro-Electro-Mechanical Systems (CMOS-MEMS) technology under monolithic microfabrication processes, and allows force measurements up to the micronewton scale.
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