Aqueous base compatible waveguide materials for optical interconnect applications

M. Moynihan, C. Allen, T. Ho, L. Little, J. Shelnut, B. Sicard, H. Zheng, G. Khanarian
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Abstract

There are a number of organic, inorganic and hybrid inorganic waveguide materials that are currently being used for a wide variety of optical interconnect applications. Depending upon the approach, waveguide formation is performed using a combination of lithographic and/or reactive ion etch techniques. Often the processes involved with waveguide formation require unique processing conditions, hazardous process chemicals and specialized pieces of capital equipment. In addition, many of the materials have been optimized for silicon substrates but are not compatible with printed wire board (PWB) substrates and processes.
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用于光学互连应用的水性基兼容波导材料
目前有许多有机、无机和混合无机波导材料被广泛用于各种光学互连应用。根据不同的方法,波导的形成是使用光刻和/或反应离子蚀刻技术的组合来完成的。通常,与波导形成有关的过程需要独特的加工条件、危险的加工化学品和专门的资本设备。此外,许多材料已经针对硅衬底进行了优化,但与印刷线路板(PWB)衬底和工艺不兼容。
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