Deconvolution Algorithm Applied to Ion Figuring

T. W. Drueding, T. Bifano, Steven C. Fawcett
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Abstract

An important step in the fabrication of an optical component involves the imparting of a precise contour on the optic, which can be expensive and time consuming. Ion beam figuring is the imparting of a contour on an optical component by removing material through the impingement of a broad beam of accelerated neutral particles, and provides a highly deterministic method for the final precision figuring (or correcting) of optical components with advantages over conventional methods. The high predictability allows the possibility of single step figuring, resulting in significant time and cost savings. And unlike grinding, polishing and lapping, ion figuring is non-contacting and so avoids several problems including: edge roll off effects, tool wear, and loading of the work piece. It has previously been demonstrated that ion figuring is effective for the correcting of large optical components [1][2]. The work discussed here is directed toward the development of the Precision Ion Milling System (PIMS) at NASA's Marshall Space Flight Center, designed for the processing of smaller (8 cm diameter) optical mirrors.
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反卷积算法在离子计算中的应用
制造光学元件的一个重要步骤是在光学元件上赋予精确的轮廓,这可能是昂贵和耗时的。离子束整形是通过加速中性粒子的宽束撞击去除材料,在光学元件上赋予轮廓的方法,它为光学元件的最终精确整形(或校正)提供了一种高度确定性的方法,具有优于传统方法的优点。高可预测性允许单步计算的可能性,从而节省大量的时间和成本。与研磨、抛光和研磨不同,离子成形是非接触的,因此避免了几个问题,包括:边缘滚落效应、工具磨损和工件负载。先前已经证明离子计算对于大型光学元件的校正是有效的[1][2]。这里讨论的工作是针对美国宇航局马歇尔太空飞行中心的精密离子铣削系统(PIMS)的发展,该系统专为加工较小(直径8厘米)的光学反射镜而设计。
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