Development of DC-DC converter for High/Low pulse voltage output using deadbeat control

Abstract

Radio frequency (RF) pulse power generators are used for generating plasma in semiconductor product manufacture. Recently, the technology for manufacturing semiconductor products is developing rapidly. In proportion to this development, the RF generators are required to be able to generate a higher frequency High/Low (HL) pulse output with keeping an accuracy setting to a reference voltage. In addition, this generator is required to have a high responsive and the ability of the very wide range power output. The main circuit of the RF generator is a DC-DC buck converter. A 200 kHz switching prototype converter is built by using a proposed deadbeat control method. The responsive and stability of it is confirmed through a simulation and an experiment. The results proves that the experimental circuit can generate the stable 40 V/4 V high/low output with the output overshoot suppression. The rising time is less than 80 μs.