Pulsed laser deposition and laser machining of diamondlike carbon films

Abstract

Recently the application of pulsed laser deposition (PLD) technique to grow different material of relevant interest for applications, especially in the field of micro devices, has been considered. We show that thin films of diamond like carbon (DLC) can be grown by means of the PLD technique, using an XeCl excimer laser. Their characterization was carried out by SEM, Raman spectroscopy and microindenter. We started a study on the etching mechanism of DLC films for possible applications in microsystems technology.