Study on combined manufacturing technology for high precision silicon aspherical optics

Abstract

Silicon aspherical optics are of widely used these years with the development of the improvement of optical manufacturing and testing technologies. Single point diamond turning for silicon aspherical optics can obtain high surface precision. However, the surface microscopic quality is difficult to reach the ideal specification, caused by the limitation of material characteristics. An experimental study on the combined manufacturing technology of single point diamond turning and polishing has been carried out and proposed in this paper. The optimum turning parameters of the main factors affecting the micro-nano quality of silicon diamond turning surface, such as cutting depth, spindle speed and feeding speed, were obtained by orthogonal experiments. After polishing, the surface roughness was reduced from 5.35 nm to 1.16 nm. Meanwhile, the PSD was improved obviously. The combined manufacturing technology can be applied for high precision silicon aspherical optics.